Semiconductor Data

Description

This example is taken from Myers et al. (2002). It involves a designed experiment in a semiconductor plant. Six factors are employed, and it is of interest to study the curvature or camber of the substrate devices produced in the plant. There is a lamination process, and the camber measurement is made four times on each device produced. The goal is to model the camber taken in 10E-04 in. as a function of the design variables. Each design variable is taken at two levels and the design is a 2^(6-2) fractional factorial. The camber measurement is known to be nonnormal.

Usage

data("semicon")

Format

A data frame with 64 observations on the following 8 variables.

Device

Devise number

x1

a x1 variable with two values -1 and 1

x2

a x2 variable with two values -1 and 1

x3

a x3 variable with two values -1 and 1

x4

a x4 variable with two values -1 and 1

x5

a x5 variable with two values -1 and 1

x6

a x6 variable with two values -1 and 1

y

camber measurement

References

Myers, P.H., Montgomery, D.C., and Vining, G.G. (2002). Generalized Linear Models with Applications in Engineering and the Sciences. John Wiley & Sons, New York.

Results